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dielectric films for advanced microelectronics
Mikhail Baklanov, Karen Maex, Martin Green (Autor)
·
wiley
· Libro Físico
dielectric films for advanced microelectronics - mikhail baklanov, karen maex, martin green
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Origen: Reino Unido
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Reseña del libro "dielectric films for advanced microelectronics"
this book presents an in-depth overview of the novel developments, made by the scientific leaders in the are of modern dielectric films for advanced microelectronic applications. this book contains clear, concise explanations of material science of dielectric films and their problem for device operation, including high-k, low-k, medium-k dielectric films and also specific features and requirements for dielectric films used in the packaging technology. it covers a broad range of related topics from physical principles to design, fabrication, characterization, and applications of novel dielectric films.
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