portada Metal Impurities in Silicon- And Germanium-Based Technologies: Origin, Characterization, Control, and Device Impact (en Inglés)

Metal Impurities in Silicon- And Germanium-Based Technologies: Origin, Characterization, Control, and Device Impact (en Inglés)

Formato

Libro Físico

Autor

Cor Claeys

Eddy Simoen

Editorial

Springer

Idioma

Inglés

N° páginas

438

Encuadernación

Tapa Blanda

Dimensiones

23.4x15.6x2.4 cm

Peso

0.66 kg.

ISBN13

9783030067472

Categorías

Ingeniería aplicada de materiales electrónicos, magnéticos y ópticos
Dispositivos y materiales electrónicos
Tecnología de microondas

Metal Impurities in Silicon- And Germanium-Based Technologies: Origin, Characterization, Control, and Device Impact (en Inglés)

Cor Claeys (Autor) · Eddy Simoen (Autor) · Springer · Tapa Blanda

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Reseña del libro "Metal Impurities in Silicon- And Germanium-Based Technologies: Origin, Characterization, Control, and Device Impact (en Inglés)"

This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices' performance. Several control and possible gettering approaches are addressed. The book offers a valuable reference guide for all researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. Adopting an interdisciplinary approach, it combines perspectives from e.g. material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.